Onto Innovation (ONTO) said Monday it has closed its acquisition of a 27% equity stake in Rigaku from Carlyle (CG) affiliate Atom Investment for 113.08 billion Japanese yen ($711.5 million).
The move will boost collaboration between the companies to develop X-ray technologies for applications in the semiconductor manufacturing space, Onto said.
Onto said it plans to account for the investment under the fair value option method and will not consolidate Rigaku's results.
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