A Chinese state-backed company has begun manufacturing immersion deep ultraviolet lithography machines, equipment largely supplied by Dutch company ASML, The Information reported Monday, citing two people familiar with the situation.
The machines are set to be delivered to Semiconductor Manufacturing International (HKG:0981, SHA:688981), Hua Hong Semiconductor (HKG:1347, SHA:688347), and newly listed ChangXin Memory Technologies (SHA:688825), according to the report, citing the sources.
The homegrown DUV tools are expected to help reduce China's reliance on foreign technology for chip manufacturing, the report said.
ASML, Hua Hong Semiconductor, SMIC, and CXMT did not immediately respond to requests for comment from.
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