KLA (KLAC) reported fiscal Q4 non-GAAP earnings late Tuesday of $1.05 per diluted share, up from $0.94 a year earlier.
Analysts polled by FactSet expected $1.00.
Revenue for the quarter ended June 30 rose to $3.66 billion from $3.17 billion a year earlier.
Analysts expected $3.61 billion.
The company set Q1 non-GAAP EPS guidance of $1.16, plus or minus $0.10, on revenue of $4 billion, plus or minus $200 million. Analysts expect EPS of $1.14 on revenue of $3.93 billion.